Abstract
Improvement of energy harvesting performance from flexible thin film-based energy harvesters is essential to accomplish future self-powered electronics and sensor systems. In particular, the integration of harvesting signals should be established as a single device configuration without complicated device connections or expensive methodologies. In this research, we study the dual-film structures of the flexible PZT film energy harvester experimentally and theoretically to propose an effective principle for integrating energy harvesting signals. Laser lift-off (LLO) processes are used for fabrication because this is known as the most efficient technology for flexible high-performance energy harvesters. We develop two different device structures using the multistep LLO: a stacked structure and a double-faced (bimorph) structure. Although both structures are well demonstrated without serious material degradation, the stacked structure is not efficient for energy harvesting due to the ineffectively applied strain to the piezoelectric film in bending. This phenomenon stems from differences in position of mechanical neutral planes, which is investigated by finite element analysis and calculation. Finally, effectively integrated performance is achieved by a bimorph dual-film-structured flexible energy harvester. Our study will foster the development of various structures in flexible energy harvesters towards self-powered sensor applications with high efficiency.
Highlights
In recent years, energy harvesting technologies have drawn attention from many researchers hoping to establish self-powered sensors and Internet of Things (IoT) systems for future applications [1,2]
We demonstrate two different types of flexible thin film energy harvesters as prototypes of multilayered piezoelectric generators fabricated by the reported stable Laser lift-off (LLO) process
We used PbZr0.52 Ti0.48 O3 (PZT) for the piezoelectric ceramics of the flexible film energy harvester because it is commonly used for various piezoelectric applications
Summary
Energy harvesting technologies have drawn attention from many researchers hoping to establish self-powered sensors and Internet of Things (IoT) systems for future applications [1,2]. Among the various energy sources in our surroundings, mechanical energy sources are highly promising for individual energy harvesting devices because mechanical energy is pervasive (e.g., machinery vibration, body activity, biomechanical movement, natural stimulation, etc.) but often wasted unwittingly [3,4]. In terms of this aspect of mechanical energy sources, the energy harvesting technology largely means the field of mechanical energy harvesting [1,2]. Energy harvesting materials and devices are important concepts for a new era of sensor applications. Some principles have been developed to convert mechanical energy to electrical energy, piezoelectric materials and devices have still been considered as prospective energy harvesting
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