Abstract

Flexible piezoelectric energy harvesters have been regarded as an overarching candidate for achieving self-powered electronic systems for environmental sensors and biomedical devices using the self-sufficient electrical energy. In this research, we realize a flexible high-output and lead-free piezoelectric energy harvester by using the aerosol deposition method and the laser lift-off process. We also investigated the comprehensive biocompatibility of the lead-free piezoceramic device using ex-vivo ionic elusion and in vivo bioimplantation, as well as in vitro cell proliferation and histologic inspection. The fabricated LiNbO3-doped (K,Na)NbO3 (KNN) thin film-based flexible energy harvester exhibited an outstanding piezoresponse, and average output performance of an open-circuit voltage of ∼130 V and a short-circuit current of ∼1.3 μA under normal bending and release deformation, which is the best record among previously reported flexible lead-free piezoelectric energy harvesters. Although both the KNN and Pb(Zr,Ti)O3 (PZT) devices showed short-term biocompatibility in cellular and histological studies, excessive Pb toxic ions were eluted from the PZT in human serum and tap water. Moreover, the KNN-based flexible energy harvester was implanted into a porcine chest and generated up to ∼5 V and 700 nA from the heartbeat motion, comparable to the output of previously reported lead-based flexible energy harvesters. This work can compellingly serve to advance the development of piezoelectric energy harvesting for actual and practical biocompatible self-powered biomedical applications beyond restrictions of lead-based materials in long-term physiological and clinical aspects.

Highlights

  • Several researchers have reported that PZT might be used for biological and in vivo applications, but these reports were only based on cell viability or histology over shortterm periods,[18,24,25] which cannot guarantee actual biocompatibility for long-term periods or repeated exposures.[26]

  • A maximum instantaneous power of ∼30 μW was elicited at ∼150 MΩ. This matching impedance was too high to be compared with conventional electronic components, due to the high internal resistance of the IDE-type piezoelectric devices,[64] our result demonstrates that lead-free piezoceramics can replace lead-based piezoelectric energy harvesters, even for mechanically flexible manner

  • The high performance in this work is even comparable to that of prior high-performance lead-based flexible piezoelectric energy harvester (f-PEH) made by sol-gel PZT films,[11,65] AD-formed PZT thick film,[55] and solid-grown Pb(Mg1/3Nb2/3)O3-PZT (PMN-PZT) thick film[66] with IDEs under similar deformations. This remarkable output performance of our lead-free f-PEH stems from the high-quality and dense AD-formed L-KNN piezoceramic thin film

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Summary

Introduction

Piezoelectric devices have been regarded as plausible mechanical energy harvesting concepts due to simple structures and environmental stability without concerns about abrasion, humidity, and bulky heaviness.[1,2,3,4,5,6,7,8,9,10] flexible energy harvesters (nanogenerators) can be fabricated using piezoelectric materials, and they are prospective candidates for realizing self-powered flexible electronics.[11,12,13,14] In that pursuit, many researchers have demonstrated high-performance flexible energy harvesters using representative lead-based piezoelectric materials, e.g., Pb(Zr,Ti)O3 (PZT),[11,12,14,15] even for wearable/bioimplantable applications.[16,17,18,19,20]. Comprehensive biocompatibility of nontoxic and high-output flexible energy harvester using lead-free piezoceramic thin film

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