Abstract

The aim of this research is to evaluate the driving performance of a cylindrical micro ultrasonic motor which has a casing diameter of 1.8 mm. The micro ultrasonic motor is driven by a cylindrical piezoelectric vibrator, which has a diameter of 0.8 mm. We evaluated the driving performance of the cylindrical piezoelectric vibrator when two different types of rotors were used and two different vibration modes were oscillated. When the frequency and the applied voltage were 314.5 kHz and 30 Vp-p, the maximum revolution speed and the starting torque were 9.6times103 rpm and 5.5 muNm, respectively.

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