Abstract

A PZT thin film application to a micro ultrasonic motor was improved by a single process hydrothermal method. The new process involves less distribution of chemical components and so contributes to higher efficiency of the stator transducer. The output torque of the micro ultrasonic motor was measured to be 7.0 /spl mu/Nm and the maximum revolution speed was 880 rpm at 15 V/sub p-p/ driving voltage. Furthermore, the relationship between KOH concentration and film performance indicated that there is ample room for further improvement in the hydrothermal method.

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