Abstract
The possibility for double pulse LIBS in the process of a direct layer-by-layer analysis of the titanium-based PVD-coatings on polished flat blank samples of steel and silicon and also of the TiAlN/TiN-coating on a milling cutter is considered. A method is proposed to control thickness of the radiation evaporated layer by defocusing the laser beam with respect to the surface, making it possible to attain the depth resolution of 0.1 μm. The Ti and Ti-Zr-coatings produced using the ion-assisted condensation method and subjected to streams of the nitrogen plasma in a magnetic-plasma compressor are studied.
Highlights
Double pulse LIBS is extensively used for quantitative analysis of various objects including the toolware manufacture of multicomponent alloys [1, 2]
The papers devoted to LIBS of thin coatings on commercial samples are few [3, 4], whereas quantitative analysis of massive objects manufactured of multicomponent alloys has been comprehensively studied and adequately described in the literature [1, 2, 5, 6]
In the majority of the works devoted to LIBS of thin layers the attention is focused on analysis of the samples with singlecomponent coatings [3, 4]
Summary
Double pulse LIBS is extensively used for quantitative analysis of various objects including the toolware manufacture of multicomponent alloys [1, 2]. The performance of various tools is improved mainly with the use of multicomponent coatings commonly formed by physical vapor deposition (PVD) During this procedure the metal surface is treated in vacuum by molecules of other metals (titanium, zirconium, aluminum, tungsten, molybdenum, iron, copper, nickel, and their alloys) in three stages: vaporization of the particles involved in the deposition process; transport of vapor to the substrate; vapor condensation on the surface with the formation of a coating. Though this surface-modification technique has been in use for more than thirty years, previously only a single-layer coating of titanium nitride (TiN) was deposited. The coating is uniformly formed on the substrate without microcracks, providing a protective layer resistant to abrasion and scratches
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