Double layer sol-gel derived antireflective coatings on silicon – Design, optical and Auger Electron Spectroscopy characterization

Abstract

Double layer, silica – titania, antireflective coatings were fabricated on silicon substrates using sol-gel method and dip coating technique. 2 × 2 transfer matrix formalism was applied to optimize these structures. Spectrophotometric measurements of reflectance were performed to determine reflective properties of fabricated structures. Their chemical homogeneity was examined by Auger Electron Spectroscopy (AES) method. It was demonstrated that weighted average reflectance from the structures can be reduced to 3.71% over spectral range 300–1100 nm.