Double-Gated, Spindt-Type Field Emitter With Improved Electron Beam Extraction

Abstract

We have developed a highly sensitive, compact image sensor that comprises a field emitter array (FEA) and a high-gain avalanche-rushing amorphous photoconductor target, with the ultimate aim of developing an ultrahighly sensitive, compact, high-definition television camera. Double-gated FEs have an advantage of having a compact electron beam focusing system; however, image intensities reproduced by the sensor were nonuniform due to low electron beam current. Furthermore, the simulated electron beam current disagreed with the measured current. The electron beam current characteristics of two types of double-gated, Spindt-type FEs (both with improved electron beam current extraction) are discussed for possible use within the sensor: convex-structured and volcano-structured. A highly accurate simulation model of the image sensor using a double-gated, Spindt-type FE has been examined; the simulated electron beam currents extracted from the double-gated, Spindt-type FE are in agreement with the measured electron beam currents when the initial electron velocity is assumed, thus suggesting that the simulated anode current–anode voltage characteristic conforms to the measured one. For example, the electron beam currents extracted from the convex-structured and volcano-structured FEs when the focusing electrode is placed 0.2 $\mu \text{m}$ below the gate electrode opening at a focusing electrode voltage of 15 V are, respectively, 1.8 and 1.9 times larger than that extracted from the previously used FEs when the focusing electrode is stacked 1.5 $\mu \text{m}$ above the gate electrode. The results show potential for reducing the degradation of the uniformity of the reproduced image’s intensity, and show that the highly accurate simulation model of the sensor is valid to design the double-gated FEAs for the sensor.