Abstract
The morphology and structure of ZrO2 films grown in steam-water medium on an ion-doped surface of zirconium and its E110 and E635 alloys have been studied. It has been found that the properties of oxide films are determined mostly by the conditions of ion-implantation doping at large oxidation times. It has been shown by the example of samples doped simultaneously with Al, Fe, Mo, and Y that the formation of a multiphase oxide film occurs due to the diffusion redistribution of implanted atoms during oxidation.
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