Abstract
1D domain patterning by electron beam in potassium titanyl phosphate crystals covered by an artificial dielectric layer were studied. The polygonal shape of the switched domains elongated along Y-crystallographic direction was obtained. The linear dose dependence of the domain size was attributed to screening of the depolarization field by injected charge. The domain size increase with electron energy is caused by increase in the electron penetration into the resist layer. Formation of an array of nanodomain streamers at the domain wall was observed. Creation of a through 1 D periodical domain pattern with a 10 µm period was demonstrated.
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