Abstract
Ditch-typed step-edge junctions and rf SQUIDs were fabricated from epitaxial YBa2Cu3O7 films on SrTiO3 substrates. The ditch on the substrate was milled by Ar-ion, using YBCO film and photoresist as masks. The structure of the SQUID is a planar square washer. The size of the outer washer and center hole is 9×9 mm2 and 200×200 μm2 respectively. The voltage-flux modulation was clearly observed at a bias frequency of 150 MHz. At 77 K, a white flux noise of 4.0×10−4 Φ0/Hz1/2 and a field resolution of 480 fT/Hz1/2 have been obtained at 5 Hz.
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