Abstract
Thin YBa 2Cu 3O 7- x superconducting films were prepared by coevaporation of Y, BaF 2 and Cu components. An in-situ annealing process in dry oxygen was used to obtain high- T c films at substrate temperatures not exceeding 600°C for Al 2O 3, and 720°C for SrTiO 3. Analyses performed by X-ray diffraction, Auger electron spectroscopy (AES) and ion-scattering spectroscopy (ISS) revealed an escape of fluorine from the deposited films already during the coevaporation stage in vacuum and preannealing steps in oxygen. The ISS spectra indicate the main fluorine concentration right beneath the film surface. In addition, the AES analyses show both the presence of fluorine at the film-surface interface and rather limited diffusion of substrate constituents into the YBCO films apparently due to the low substrate temperatures used.
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