Abstract
Preheating the substrate is a common technical method widely used during the deposition in various routes. The applied procedure can effectively distort the features of the final films. Our investigation experimentally discussed how the heating substrate's fashion during the depositing process influences the zinc oxide (ZnO) film’s characteristics. After annealing in the same conditions, the annealed samples with different substrate heating modes show significantly different properties. The films deposited through the preheating method are identified with more various types of defects, a transformed crystal structure, and a peculiar morphology (cone-like structure). The Photoluminescence (PL) spectra of the samples indicate different emission peaks and bandgap energies. X-ray diffraction (XRD) results demonstrate the complexities of preheating technique compared to the heating substrate.
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