Dissociative ionization of silane

Abstract

The dissociative ionization cross-sections of silane (SiH4), have been measured by Fourier transform mass spectrometry. Neither the molecular ion SiH4+ nor the hydrogen ions H2+, H+ are formed by electron impact. Cross-sections for the other silicon hydride ions at 50 eV are: σ(SiH3+) = (0.5 ± 0.08) × 10−16 cm2, σ(SiH2+) = (0.74 ± 0.11) × 10−16 cm2, σ(SiH+) = (0.21 ± 0.03) × 10−16 cm2, and σ(Si+) = (0.19 ± 0.03) × 10−16 cm2.