Abstract
In displaced aperture dark field microscopy, the direction of the incident electron beam with respect to the specimen is maintained unaltered between bright field and dark field images, unlike the case of usual high resolution dark field microscopy by tilted illumination. The displaced aperture technique, however, gives a strong dark field image deterioration due to field aberrations. These are prounouncedly large since the deviation of the orbits of the imaging electrons from the optical axis is very large in this case. In the present paper, the improvement of the image quality by aberration correction is discussed.1. The chromatic field aberration is composed of components mainly from the objective and intermediate lenses. It can be corrected by changing the electron orbit by means of a beam deflector, introduced in the image plane of the objective lens.
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