Abstract
Discrimination effects caused by the convolution of the diverse shapes of the secondary ion energy spectra with the fixed ion optical and energy-bandpass characteristics of the CAMECA IMS-300 ion microanalyzer are discussed. Substantial differences in the transmission efficiency of the ion optics between atomic ions, and very large differences between atomic and polyatomic ions have been found. The influence of discrimination effects on the appearance of a SIMS spectrum is illustrated, and the potential influence of the effects on quantitative analysis is discussed.
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