Abstract

Polishing of oxide film on ELID wheel surface has an important effect on grinding surface quality. First, electrochemical reaction of oxide film was researched, and transformation mechanism of component of oxide film under grinding temperature was proposed. The phase compositions, generation and transformation mechanism of the α-F2O3 in the oxide film was measured by XRD, XPS, FITR. The microstructure of oxide film was observed by using TEM. Researched results show, α-F2O3 in the oxide film have been found, the content and transformation of α-F2O3 are closely related to the grinding temperature. Iron oxide in oxide film is transformed into α-F2O3 with temperature gradually, and nano grain α-F2O3 with high purity, good crystal lattice, and grain size 10–80 nm is formed when grinding temperature is 600 °C. TEM analyzed shows, the grain in oxide film is spherality, and film structure is formed with multiple particles α-F2O3. The film structure reveals that polishing mechanism of oxide film isn’t independent act of single particle, but is cooperative behavior of multiple particles α-F2O3.

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