Abstract
Freestanding micro-tubes were obtained by directional scrolling of SiGe/Si/Cr and SiGe/Si hybrid- and hetero-structures on Si(1 1 0) and Si (1 1 1) substrates. In addition, on a Si(1 1 1) surface, helical nanobelts and vertical structure were achieved too. Compared to a Si(0 0 1) substrate, hetero-films on Si(1 1 0) and Si(1 1 1) substrates present different preferred scrolling directions for tubes resulting from the strong anisotropic underetching rate in directions parallel to the substrates surface. The design rules for the fabrication of micro- and nanotubes on Si(1 1 0) and Si(1 1 1) substrates are elucidated. The flexibility in the design is promising for applications in micro- and nano-electromechanics.
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