Abstract
The incident electron beam effects for energies 0.5–2keV, measured by Auger and elastically backscattered electrons, were investigated experimentally and theoretically for the (001), (111), and (110) Cu crystals. The Auger signal and the height of the elastic peak were measured as a function of the incident angle of the primary beam with the use of an retarding field analyser (RFA). Very well distinguished intensity maxima were found for incident angles corresponding to the closely packed rows of atoms. The experimental results correspond to the theoretical data where single scattering cluster (SSC) approximation was used. The damping of Auger and elastically backscattered electrons in the sample caused the inclination of the profiles towards the grazing angles. The best correspondence between theory and experiment was found for the primary beam energies in the range 1.0–1.3keV.
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