Directed Self-Assembly of Cylinder-Forming Block Copolymers Using Pillar Topographic Patterns.

Abstract

We conducted a computational study on the self-assembly behavior of cylinder-forming block copolymers, directed by a guide pattern of hexagonally or tetragonally arrayed pillars, using mesoscale density functional theory simulations. By adjusting the spacing (Lp) and diameter (D) of the pillars in relation to the intrinsic cylinder-to-cylinder distance (L2) of the cylinder-forming block copolymer, we investigated the efficiency of multiple-replicating cylinders, generated by the block copolymer, through the pillar-directed self-assembly process. The simulations demonstrated that at specific values of normalized parameters L˜2=L2/Lp and D˜=D/Lp coupled with suitable surface fields, triple and quadruple replications are achievable with a hexagonally arrayed pillar pattern, while only double replication is attainable with a tetragonally arrayed pillar pattern. This work, offering an extensive structure map encompassing a wide range of possible parameter spaces, including L˜2 and D˜, serves as a valuable guide for designing the contact hole patterning essential in nanoelectronics applications.