Abstract
Cu-based micropatterns were fabricated using reductive sintering inside Cu2O nanosphere films induced by green femtosecond laser pulses. The linear and nonlinear absorption coefficients of Cu2O nanosphere films composed of Cu2O nanospheres, polyvinylpyrrolidone, and 2-propanol were 0.062 × 104 /cm and 10−50 cm/GW, respectively. The minimum line width was the same as the laser spot diameter (∼0.7 µm), indicating negligible thermal diffusion for metallization. Cu-based micropatterns with different heights were formed by varying the position of the focal spot along the z-axis by focusing the laser pulses on the films and then scanning. This technique is applied to three-dimensional microfabrication.
Published Version
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