Abstract
The new laser micromachining projection microscope enables a surface to be viewed at high magnification with a built-in facility for micromachining of the same surface according to a predetermined pattern. A XeCl-excimer laser forms part of the device and provides bright viewing illumination in amplified spontaneous emission as well as a small laser spot of sufficient fluence to mark the sample surface. The basic characteristics of image enhancement in the excimer amplifier are presented. The advantage of such a technique for both pattern generation, surface cleaning and mask correction is demonstrated on Al, Cu and W specimens with a spatial resolution better than 3 μm.
Sign-in/Register to access full text options 
Free) 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a call
