Abstract
A direct spectral phase function calculation method based on spectral phase shifting is described. We show experimentally that the direct phase function calculation method can provide a simple and fast solution in calculating the spectral phase function, while maintaining the same level of accurate measurement capability as that based on the Fourier transform approach.
Highlights
With rapid progress in the optoelectronics industry, demands on fast, non-destructive 3-D micro profilometry have greatly been increased
Experiments were carried out to show that the proposed direct phase function calculation method based on the spectral phase shifting can provide a faster way of obtaining the spectral phase function φ(k) than the Fourier transform method, while maintaining the benefit of the high accurate thickness profile measurement capability of the Fourier transform approach
In order to estimate the performance of the spectral scanning interferometric thickness profilometry based on the direct spectral phase function calculation method in comparison with that based on Fourier transform method, we conducted measurements of the 3-D shape information for the two objects
Summary
With rapid progress in the optoelectronics industry, demands on fast, non-destructive 3-D micro profilometry have greatly been increased. In the spectral domain, three-dimensional surface profile data can be obtained by measuring the slope of the spectral phase function, which can be calculated by use of the Fourier transform method. The Fourier-transform method was the only approach for calculating the spectral phase function for the spectral domain analysis [9]. The Fourier transform approach has a benefit in terms of its flexible signal processing capability It has some disadvantages in terms of long computation time and complexity of use compared with the proposed direct spectral phase calculation method. We show experimentally that the direct phase function calculation method can provide a simple and fast solution for obtaining the spectral phase function while maintaining the same level of high accurate thickness profile measurement capability as that obtainable by use of the Fourier transform method
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