Abstract
This paper reports the modification of a silicon nitride atomic force microscope tip using a focused ion beam to produce a pillar-shaped tip for the attachment of a single 155-nm Teflon nanoparticle. The Teflon nanoparticle is charged via contact electrification to produce a point charge for the measurement of the electrostatic field within the Zernike electrostatic phase plate. The resulting device was then used to measure the distribution of the electrostatic field at the nanoscale, the results of which were compared with those obtained through ansoft maxwell simulation.
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More From: Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
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