Abstract
The relative sensitivities of Auger electron spectroscopy (AES) and x-ray photoelectron spectroscopy (XPS or ESCA) have been compared for 54 elements, using the same electron analyzer under identical experimental conditions in ultrahigh vacuum. Signal-noise ratios derived from N (E) ESCA spectra and dN (E)/dE AES spectra showed that AES is a more sensitive technique for most elements, particularly those of low atomic number. These ratios of AES and ESCA detectabilities, which varied over a range more than 2 orders in magnitude, can be used as a guide for selecting the more sensitive technique for a particular element.
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