Direct bonding of LiNbO3 and GaAs at room temperature by using activated Si atom layer

Abstract

Heterogeneous integration of LiNbO3 and GaAs at room temperature has been achieved by using an activated Si atom interlayer, which demonstrate effectiveness in the fabrication of GaAs based LiNbO3 wafer. By using the activated Si atom interlayer as the adhesive layer, 4-inch LiNbO3 wafer is successfully directly bonded to the surface of GaAs wafer. The wafer bonding rate reaches over 95%. After bonding, the LiNbO3/GaAs bonding pair is cut into 10 × 10 mm2 square bonded chips. After annealing, the maximum bonding strength of square bonded chips exceeds 22 MPa. This means that the bonding strength of LiNbO3/GaAs wafer can be comparable to that of bulk materials. The characterization results of the bonding interface confirm that the intermediate amorphous Si layer is effective in improving the bonding strength and quality of LiNbO3/GaAs heterojunction. Heterogeneous integration of LiNbO3 with GaAs and other Ⅲ-Ⅴ compound semiconductor materials is conducive to reducing the area occupied by optical communication platforms and improving the overall efficiency of devices.