Abstract
We propose a surface measurement method based on optical frequency comb heterodyne interferometry ranging. A digital micromirror device is used to establish a single-pixel detection system without a mechanical scanning device and realize high-speed sampling. The measurement range of the step height is extended by synthetic wavelength interferometry from half of the carrier wavelength to half of the synthetic wavelength (40 μm in this system). Thus, a sample composed of three gauge blocks and an MEMS device of the teardrop-shaped groove were measured with an accuracy of 5 nm and a measurement time of 27 ms.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
