Abstract
On the basis of the fact that the mean square displacement of atoms in the vicinity of the surface is higher than that in the bulk, a thin film diffusion size effect is introduced. In films of the order of 100 Å thick it leads to a marked increase in the diffusivity as the film thickness decreases. The size effect introduced is used to explain experimental data on the high diffusivity in thin films. The approach developed should also be taken into account when consideration is given to other thermally activated processes in thin films as well as in the vicinity of free surfaces, interfaces and grain boundaries (segregation, vacancy distribution and migration to the surface, phase formation etc.).
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