Abstract

By optimizing the diffusion temperature and time, four groups of samples with different sheet resistances are achieved. The front screen printing pattern and firing temperature are fine-tuned according to the needs. The performance of the low-and-plateau-temperature doping recipe (as recipe A) is better than that of the low-and-multiple-temperature doping recipe (as recipe B). And the 19.24% efficiency of volume production of monocrystalline solar cells with 238.95 mm2 and 80 W/sq sheet resistance is obtained in the traditional process line. 0.48% more efficiency is achieved than 60 W/sq due to the reduction of the phosphorus surface doping and shallow junction by the low-and-plateau-temperature diffusion recipe. The module test shows that by using two drive-in zones, not only do we have a higher efficiency, but also have a stabler and lower power loss in encapsulation manufacture. It is showed that power of a large improvement will be gotten by statistical analysis and PC1D simulation.

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