Abstract
The moisture barrier properties of polyimide (PI) thin films used for passivation in microelectronic devices are poorer than those of many other polymers. The enhancement of the barrier properties of PI films obtainable by coating them with polymers of lower permeability to form multilayer composite membranes was investigated. In this paper we report a study of the diffusion and permeation of water vapor in four composite PI/polymer thin films: PI/polyethylene, PI/polyethylene-acrylic acid, PI/polyvinylidene fluoride and PI/poly(chloro- p-xylylene). The temperature-dependent permeability coefficient of single-layer and composite thin films was measured and found to follow the Arrhenius relation with low activation energies (lower than 6 kcal mol −1). Enhancement in the barrier properties by a factor of 4–6 at 30°C is attained when 2–3 μm PI films are coated with 2 μm films of the four polymers investigated.
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