Ca Cell의 보호막으로 증착된 (SiO2)1-x(ZnO)x무기 혼합 박막들의 투습 특성

Abstract

We investigated the properties of inorganic diatomic films like silicon oxide (<TEX>$SiO_2$</TEX>) and zinc oxide (ZnO) and their composite films are packed as a passivation layer around Ca cells on glass substrates by using an electron-beam evaporation technique and rf-magnetron sputtering method. When these Ca cells are exposed to an ambient atmosphere, the water vapor penetrating through the passivation layers is adsorbed in the Ca cells, resulting in a gradual progress of transparency in the Ca cells, which can be represented by changes of the optical transmittance in the visible range. Compared with the saturation times for the Ca cells to become completely transparent in the atmosphere, the protection effects against permeation of water vapor are estimated for various passivation films. The thin composite films consist of<TEX>$SiO_2$</TEX> and ZnO are found to show a superior protection effect from water vapor permeation compared with diatomic inorganic films like <TEX>$SiO_2$</TEX> and ZnO. Also, this inorganic thin composite films are also found that their protection effect against permeation of water vapor can be significantly enhanced by choosing their suitable composition ratio and deposition method, in addition, the main factors affecting the permeation of water vapor through the oxide films are found to be the polarizability and the packing density.