Differential Pressure/Pressure Transmitters Applied with Semiconductor Sensors

Abstract

The optimum design for silicon diaphragm-type pressure sensors and that for a sensing body of the transmitters have been considered. Three types of sensors, which have different section shapes, have been developed for measuring wide-range pressure with high sensitivity and good linearity. The transmitters of the range from 0-100 Pa up to 0-50 MPa with an accuracy of 0.2 percent have been developed. For a differential pressure transmitter a three-metal diaphragm structure has been devised to protect the sensor from an overpressure. The characteristics of the transmitters are high accuracy, high reliability, and long-term stability.