Abstract
A differential-phase-contrast knife-edge scan method is proposed to precisely evaluate X-ray nanofocusing beam profiles. A thin phase object can be used as a knife edge in this method, whereas the conventional absorption knife-edge scan method requires a thick opaque edge. The precision of the focal beam profile measurement was confirmed by numerical calculation. The performance test was carried out at the undulator beamline 20XU of SPring-8, by evaluating the focal spot profile of a tantalum Fresnel zone plate with an outermost zone width of 25 nm. The edge pattern of a tantalum test chart with a thickness of 500 nm was used as the knife edge. The measured beam profile with a size of 25 nm ± 1 full-width at half-maximum was carefully compared with the theoretical values and found to be in good agreement.
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