Abstract
Inelastic electron scattering cross section spectra (Kλ-spectra) of SiO2 were dissolved into bulk-loss and surface-loss components using factor analysis and Tougaard functions approximation. Primary electron energy dependences of various components intensities were received. It was shown that joint using of factor analysis and Tougaard functions approximation allows receiving more reliable results in inelastic electron scattering cross section spectra studies.
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