Different algebraic method for computing the high-order aberrations of practical combined focusing-deflection systems

Abstract

Differential algebraic (DA) method is an effective technique in computer numerical analysis. It implements conveniently differentiation up to arbitrary high order, based on the nonstandard analysis. Some complicated nonlinear dynamics problem including high-order aberrations of electron optical systems can be solved effectively by mapping properties of DA quantities. However, the existing study applying DA method to the practical system is limited to simple electron lenses. In this paper, the application of DA method is extended to practical combined focusing-deflection systems, and the aberrations up to fifth order are calculated. The electric and magnetic fields of the electron lenses and deflectors, which are computed by finite element method (FEM) or finite difference method (FDM), are in the form of discrete arrays. Local analytical expressions for electric and magnetic field quantities are constructed from these arrays for arbitrary place where electron is traced in DA computation. Thus the developed DA method is applicable for engineering design and computing problem. Based on the study of the expressions and the structure of the aberration coefficients for the fifth-order aberrations of the combined focusing-deflection system and the local analytic expression of the practical electromagnetic field, correlative computer software was developed, whose interface is convenient to calculate the high-order aberrations of the practical systems. The new DA method and software are tested with a uniform magnetic field deflection having an analytic solution. And the results show that the accuracy is sufficiently high, only limited by machine precision. Finally, as an example, a practical combined magnetic focusing and magnetic deflection system is analyzed and discussed.