Dielectric V-ridge gratings: transition from antireflection to retroreflection.

Abstract

We present a systematic study of the optical properties of dielectric gratings with symmetric V-shaped ridges having a 90 degree apex angle and refractive index n. Such structures exhibit completely different optical properties if the dimensions are scaled with respect to the vacuum wavelength λ0 of light. In the subwavelength domain, where the grating period d is less than λ0/n, the grating behaves as an antireflection layer. In the large-period domain d≫λ0 (with normal incidence from the dielectric side), the grating turns into a micro-retroreflector array. The transition between these well-known domains is studied using rigorous diffraction theory. The results are verified experimentally by fabricating and characterizing V-profile gratings with the aid of wet etching of silicon using a process that defines a 90 degree apex angle and replication into a polymer.