Abstract
Multilayered Ba0.7Sr0.3TiO3/Ba0.5Sr0.5TiO3 (BST0.7/0.5)n (n = 1, 2, 3 and 4, respectively) thin films with different layered periods are prepared on Pt/TiO2/SiO2/Si substrates by chemical solution deposition method. The microstructure and dielectric properties of the films are investigated systematically. Obvious dielectric enhancement occurs in (BST0.7/0.5)n multilayer comparing with Ba0.5Sr0.5TiO3 and Ba0.7Sr0.3TiO3 monolayered thin films due to Maxwell-Wagner effect. On the other hand, strain and grain sizes of the multilayered thin films can also affect the dielectric properties. Specially, the (BST0.7/0.5)2 shows the best dielectric properties with dielectric constant of 557, loss tangent of 0.025 and tunability of 46% at 200 KHz, which is beneficial in applications.
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