Dielectric Coating Deposition Regimes during Electron-Beam Evaporation of Ceramics in the Fore-Vacuum Pressure Range

Yury G Yushkov,Andrey V Tyunkov,Efim M Oks,Denis B Zolotukhin

doi:10.3390/coatings12020130

Abstract

We present experimental results on the deposition of dielectric coatings on metal surfaces by electron-beam evaporation of alumina ceramics in nitrogen and oxygen gas medium at the pressures of 5–30 Pa. The feasibility of implementing this approach is associated with the use of unique fore-vacuum plasma electron sources. The effect of electron beam power on the rates of ceramic target evaporation and, consequently, on the coating deposition rate is investigated. The structure, electrical-insulating and mechanical (wear resistance, adhesion) properties of the deposited coatings is investigated. We also show the possibility of using coatings for electrical insulating of wires and monolithic integrated circuits.

Highlights

Dielectric Coating DepositionThe most effective way of modifying the surface of materials is through the deposition of thin-film, 0.01–50 μm, coatings of various materials with a given structure and property [1,2]
The fabrication of quality ceramic-based dielectric coatings is a topical problem, since such coatings provide all above properties and are inexpensive to produce
Ceramic coatings are usually manufactured in the form of thin and fragile layers that are prone to cracking, and, under cyclic thermal load, to peeling [7]

Summary

Introduction

The most effective way of modifying the surface of materials is through the deposition of thin-film, 0.01–50 μm, coatings of various materials with a given structure and property [1,2]. The advance in this research field that relies on using simple materials (conductive metal- and alloy-based coatings [4], oxide, nitride and carbide [5,6] coatings) has almost reached its limitations. Further progress in this area is deemed possible by switching to the use of composite (hybrid) materials that combine the best properties of their components. Ceramic coatings are often fabricated as complex silicates with additions of ZrО2 , ТiO2 , A12 О3 , CеО2 , etc., capable of protecting the substrate material against temperatures as high as 1300 ◦ C [15]

Methods

Results

Conclusion