Dielectric Anisotropy of Organic Interlayer Dielectrics Confined in Submicron

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ABSTRACTDielectric anisotropy was studied using two fluorinated polymers(fluorinated polyirnide and fluorinated poly(aryl ether)), which are promising candidate as interlayer dielectrics(LLD). From the measurement of the optical anisotropy, the fluorinated polyimide has larger birefringence than fluorinated poly(aryl ether) because the fluorinated polyimide is a rigid rod-like polymer, while the fluorinated poly(arly ether) has an ether linkage to allow the flexibility. The large optical birefringence in the fluorinated polyimide may indicate the large dielectric anisotropy. The dielectric anisotropy of more flexible fluorinated poly(arly ether) was very similar to the expected anisotropy from optical birefringence, but the fluorinated polyimide with rigid rod-like chains has much smaller dielectric anisotropy than expected in the spin-coated film. From the FTLR spectra of the rigid rod-like polymer, the olecular orientation of the rod-like polymer confined in the submicron gaps is shown to be different from that of the blanket film spin-coated on the substrate. This change of the molecular orientation in the confined submicron gap is responsible for the change of the dielectric anisotropy.