Dielectric and Piezoelectric Properties of Low Temperature Sintering Pb(Mn1/3Nb2/3)O3-Pb(Zn1/3Nb2/3)O3-Pb(Zr0.48Ti0.52)O3 Ceramics for Low Loss Multilayer Piezoelectric Actuator Application

Abstract

In this study, in order to develop the composition ceramics for low loss and low temperature sintering multilayer piezoelectric actuator with high mechanical quality factor (Qm), Pb(Mn1/3Nb2/3)O3-Pb(Zn1/3Nb2/3) O3-Pb(Zr0.48Ti0.52)O3 (abbreviated as PMN-PZN-PZT) ceramics were fabricated using two-stage calcination method and Li2CO3, Bi2O3 and CuO as sintering aids and their piezoelectric characteristics were investigated according to the 2nd calcination and sintering temperature. All the specimens showed tetragonal phase structure without secondary phase. With increasing calcination temperature, tetragonality were increased at calcination temperature of 850°C and then decreased. At the calcination temperature of 750°C and sintering temperature of 930°C, density, electromechanical coupling factor (kp), mechanical quality factor (Qm), dielectric constant (ϵr) and piezoelectric constant (d33) of specimen showed the optimum values of 7.94 g/cm3, 0.581, 1554, 1555 and 356pC/N, respectively for low loss multilayer piezoelectric actuator application.