Abstract
Carbon clusters with selected size distributions centered around C 20 , C 60 and C 900 produced with a laser vaporization source have been deposited on various substrates at room temperature to produce films with thicknesses as large as 100 nm. C 20 have been choosen for its nearly pure sp 3 hybridization, C 900 for its quasi pure sp 2 bonding character and C 60 for its mixed state. Structures and properties of the films were characterized using various complementary techniques : atomic force microscopy, electron diffraction, Raman scattering, Electron energy loss spectroscopy, X-ray absorption near edge structure, Fourier transform infrared spectroscopy and Auger electron spectroscopy. The results show that the low energy cluster beam deposition allows to growth films in which the particular structures and properties of the free clusters can be conserved. The attractive field of applications of this technique concerns the possibility of realising Diamond-like thin films with controlled hybridization (sp 3 -sp 2 ) and nanostructure from amorphous diamond to amorphous graphite.
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