Diamond nitrogen-vacancy color-centered thermometer for integrated circuit application.

Abstract

With the advancement of the chip industry, accurate temperature measurement and thermal management have become crucial. Traditional infrared temperature imaging has limitations in terms of resolution and accuracy. lnrecent years, quantum diamond nitrogen-vacancy centers have emerged as a promising option for temperature sensing, but separating temperature from magnetic field effects remains a challenge. This paper presents a numerical approach to decouple temperature and magnetic fields using an ensemble Hamiltonian in high-current density Integrated Circuit (IC) applications. The proposed method demonstrates a temperature sensitivity of 22.9 mK/Hz1/2 and the ability to perform scanning temperature imaging with a spatial resolution of 20 µm on a typical IC.