Diamond microstructures for optical micro electromechanical systems

Abstract

We have used hot filament chemical vapour deposition (HFCVD) to fabricate diamond microstructure components for optical micro electromechanical systems (MEMS). In order to demonstrate the wide application range for diamond technology we have made components for different applications such as diffractive optics, laser-to-fibre alignment, and active cooling of high power devices. The free-standing polycrystalline diamond devices were grown on moulds of silicon and fused silica, creating replicas of the moulds. The structured silicon-on-insulator (SOI) wafers as replicating moulds for diamond deposition makes it possible to create shapes that can be very useful for laser-to-fibre alignment. The two-step SOI diamond deposition process enables the creation of long and precise capillaries or capillary arrays with a flat top-side here intended for cooling of high power electronic devices. Furthermore, microstructured fused silica has been introduced as mould material, which gives new possibilities in micro-optical mould design since fused silica technology is much more common in optical industry.