Diamond microelectromechanical sensors for pressure and acceleration sensing

Abstract

Micro-electro-mechanical structures (MEMS) are fabricated from chemical vapor deposition (CVD) diamond films. Applying microlithographic semiconductor device fabrication process techniques, monolithic diamond piezoresistors are incorporated on a diamond substrate. This paper reviews the design and behavior of diamond MEMS (DMEMS) pressure and accelerometer sensors fabricated on the same scale as silicon devices. The sensors are designed for extreme environments where diamond's elastic modulus, gauge factor, inertness, and high temperature semiconduction play a vital role in the sensors performance. This work garners more information as to diamond's piezoresistive (PZR) behavior and functionality as a MEMS device.