Abstract
Porous diamond membranes were fabricated using a method based on growing diamond on a patterned silicon surface. Protrusions on the silicon surface acted as molds for forming the pores on the diamond film. The membrane described here was 10 μm thick, 15 mm in diameter, had a pore size of about 60 μm in diameter and a nominal pore density of 1.56 mm −2 . The method is highly versatile and a wide variety of pore surface configurations can be formed; the technique used allows a wide parameter range. These kinds of membranes could have application as heat exchangers and as filtering devices.
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