Abstract
Abstract Diamond-like carbon (DLC) thin films were prepared by high power impulse magnetron sputtering (HiPIMS) with different deposition conditions. The main variable parameters were the argon flow rate, and deposition time. The carbon films were characterized by X-ray photoelectron spectroscopy (XPS) and X-ray absorption spectroscopy (XAS). The results from the XPS measurements show that the DLC films are composed of two main different carbon species; i.e. carbon with sp3 and sp2 configurations. The XAS measurements reveal that the DLC films contain hydrogen. The present of hydrogen affects the sheet resistivity of the films. The resistance of the DLC films increases exponentially when the temperature decreases.
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