Abstract
Diamond-like carbon (DLC) coating was deposited on both sides of double sided polished single crystalline germanium substrate by RF plasma enhanced chemical vapour deposition (RF-PECVD). DLC coatings were deposited at 100sccm of C2H2 flow and constant power of 200W at deposition temperatures of room temperature (25oC) and 150oC. DLC coatings were analysed by ellipsometry, Raman analysis and Fourier-transform Infrared (FTIR). Characterizations confirmed the formation of DLC coatings with Id/Ig ration of 0.5 to 1.3 and, refractive index (n value) of 2.38. DLC coating deposited at 150oC shows low adherence than the room temperature deposition. Antireflection property was studied by FTIR in transmission mode. FTIR spectrum on DLC deposited of double side coated germanium at room temperature showed enhancement in maximum transmission above 90% in 3–6μm wavelength.
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