Diagonal in space of coordinate measuring machine verification using an optical-comb pulsed interferometer with a ball-lens target

Abstract

This paper presents a new optical method of coordinate measuring machine (CMM) verification. The proposed system based on a single-mode fiber optical-comb pulsed interferometer with a ball lens of refractive index 2 employed as the target. The target can be used for absolute-length measurements in all directions. The laser source is an optical frequency comb, whose repetition rate is stabilized by a rubidium frequency standard. The measurement range is confirmed to be up to 10m. The diagonals of a CMM are easier to verify by the proposed method than by the conventional artifact test method. The measurement uncertainty of the proposed method is also smaller than that of the conventional method because the proposed measurement system is less affected by air temperature; it achieves an uncertainty of approximately 7μm for measuring lengths of 10m. The experimental results show that the measurement accuracy depends on noise in the interference fringe, which arises from airflow fluctuations and mechanical vibrations.