Abstract
A generalized diagnostics principle of microwave cut-off probe is presented with a full analytical solution. In previous studies on the microwave cut-off measurement of weakly ionized plasmas, the cut-off frequency ωc of a given electron density is assumed to be equal to the plasma frequency ωp and is predicted using electromagnetic simulation or electric circuit model analysis. However, for specific plasma conditions such as highly collisional plasma and a very narrow probe tip gap, it has been found that ωc and ωp are not equal. To resolve this problem, a generalized diagnostics principle is proposed by analytically solving the microwave cut-off condition Re[εr,eff(ω = ωc)] = 0. In addition, characteristics of the microwave cut-off condition are theoretically tested for correct measurement of the absolute electron density.
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