Diagnostics and Simulation of Low-Frequency Inductively Coupled Plasmas

Abstract

The results on the diagnostics and numerical modeling of low‐frequency (∼460 KHz) inductively coupled plasmas generated in a cylindrical metal chamber by an external flat spiral coil are presented. Experimental data on the electron number densities and temperatures, and optical emission intensities of the abundant plasma species in low/intermediate pressure argon discharges are included. The spatial profiles of the plasma density, electron temperature, and excited argon species are computed, for different RF powers and working gas pressures, using the 2D fluid approach. The model allows one to achieve a reasonable agreement between the computed and experimental data. The effect of the neutral gas temperature on the plasma parameters is also investigated. It is shown that neutral gas heating at higher (> 1 kW ) RF powers is among the key factors that control the electron number density and temperature. The dependence of the average RF power loss, per electron‐ion pair created, on the working gas pressure s...