Abstract
Parameters of hydrogen plasma in a miniature Penning discharge ion source, including the electron temperature and the electron density, were measured by using double probes. The results indicate that the electron density increases and the electron temperature decreases with the increase in gas pressure and the discharge current. The electron temperature is about 5–9 eV and the electron density is 6.0×1013 ∼ 1.2 × 1014 m−3 while the discharge current is in a range of 50 ∼ 120 μA.
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